EDS is one of the better known methods applied to failure analysis and is also referred to as energy dispersive X-ray EDX spectroscopy and even EDAX which was a pioneering company in the development of the method. The electron beam is produced by an electron gun commonly fitted with a tungsten filament cathode as the electron source.
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The electron beam is accelerated by an anode typically at 100 keV 40 to 400 keV with respect to.
Backscattered electron image.
The original form of the electron microscope the transmission electron microscope TEM uses a high voltage electron beam to illuminate the specimen and create an image.
Wolfgong in Handbook of Materials Failure Analysis with Case Studies from the Aerospace and Automotive Industries 2016 35 EDS and WDS.
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